When this research was performed, the authors were with theLaboratory for laze Energetics & Center for Optics Manufacturing, Universityof Rochester, 250 East River Road, Rochester, Thành Phố New York 14623-1299.

B. E. Gillman is currently with Zygo Corporation, Laurel Brook Road,P..O. Box 448, Middlefield, Connecticut 06455-0448.




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Birgit E. Gillman và Stephen D. Jacobs, "Bound-abrasive polishers for optical glass," Appl. Opt. 37, 3498-3505 (1998)
HistoryOriginal Manuscript: September 19, 1997Revised Manuscript: January 9, 1998Published: June 1, 1998

Abstract

Polishing abrasives that have been bound in a solid matrix can offer severalpotential advantages over loose-abrasive sầu processes with pitch or polyurethanelaps for finishing of optics. These advantages include polishing efficiency,temperature stability, cost of consumables, và compatibility with computernumerically controlled generating machines. Unfortunately, little has beenpublished on bound-abrasive sầu polishers, and very few commercially availableproducts exist. We have sầu developed several compositions & manufacturingtechniques that show promise for polishing a variety of optical glasses. Weestablish the various criteria for a successful bound-abrasive sầu polisher. Thenumerous variables lớn be considered in designing these polishers are identified,& the results of screening experiments are used to lớn find successfulcompositions. Polishing experiments with bound abrasives in arrays of pellets,as ring tools, và as full-liên hệ laps are described.

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ID No.:Composition, wt.%aShore DHardnessYoung’s Modulus GPaShear ModulusGPaDensity(g/cm3)FormUsedcAir Waterb
PoliritCeO2      
50% purea /2.0-μmsizee      
AS: Aquapolstandard unknown composition906618.07.83.99spa rtc
CeRite 415KCeO2      
75% puref /2.0-μmsizeg      
1:881112.14.83.99rt
 94CeO2      
 6 epoxy       
 0e.p.a      
2:782311.34.53.96mpage authority rtc
 93CeO2      
 7 epoxy       
 0 e.p.       
3:888114.15.73.2rt
 75%CeO2      
 10% epoxy       
 15% e.p.(all h.al.s.a )       
CeRite 4251CeO2      
một nửa puref /1.5-μmsizeg      
4:7363nana2.53mpage authority rt
 75%CeO2      
 10% epoxy       
 15% e.p.(all h.al.s.)       
CeRox 1663CeO2      
90% puref /1.0-μmsizeg      
5:75na12.44.72.64mpa rt
 63%CeO2      
 25% epoxy       
 12% e.p.(10 h.al.s+ 2 a.cl.a )       
6:7060nana3.40mpa rt
 85%CeO2      
 10% epoxy       
 5% e.p.(all a.cl.)       

ae.p., erosion promoter (h.al.s., hollow alumina spheres; a.cl.,NH4Cl)b60-min soak at 25 °C in buffered pH 10 DI water w/gentleagitationcspa làm đẹp, single-pellet array; mpage authority, molded-pellet array; rt, ring tooldRef. 22eRef. 42fRef. 43gRef. 44
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×Table 2
Polishing Results for Bound-Abrasive sầu Pellet Array Laps after 30 min


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Composition Glass (Hardnessa ) Finalrms,b (nm)
5SF7(3.4)1
 SK7(4.8)1
 BK7(5.1)1
6fused silica(6.5)1.5 (60 min)
 TaFD5 (6.7) 1.5 (60 min)